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Silicon Carbide Wafer Dislocation Density Detection --- KOH Etching Detection of Silicon Carbide
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Silicon Carbide Wafer Dislocation Density Detection
--- KOH Etching Detection of Silicon Carbide
1. Principle of Detection Method
Defect-selective etching is a rapid and effective method for characterizing crystal quality, particularly for semiconductor single crystals. The shape and density of etch pits reflect the types and densities of defects in the single crystal. SiC substrates can exhibit anisotropic etching in alkaline etchants, meaning that the etching rates differ based on crystal orientation. This anisotropic etching results in the formation of regularly shaped etch pits at defect sites, with their shape related to the atomic arrangement of the most densely packed planes.
Using KOH chemical etching (KOH high-temperature etching) technology, we can reveal dislocation defects in SiC substrates or epitaxial materials from the Si face. By observing the etch pits on the sample surface with an optical microscope, we can categorize the pits into three types based on their size and morphology. As shown in Figure 1, we present magnified results of the dislocation morphology of our etched silicon carbide wafers, which include screw dislocations (TSD), edge dislocations (TED), and basal plane dislocations (BPD).
The etch pits are classified, and the dislocation density in each field of view is calculated, ultimately providing the dislocation density and distribution within the wafer, as illustrated in the histogram in Figure 2 and the two-dimensional plot in Figure 3.
2. Detection Standards
i. GB_T 30868-2014 "Determination of Microtubule Density of Silicon Carbide Wafers by Chemical Etching Method"
ii. T/CASA 013-2021 "Dislocation Density Detection Method for Silicon Carbide Wafers Using KOH Etching Combined with Image Recognition"
3. Sample Requirements
Silicon carbide polished substrates or epitaxial wafers, with a sample diameter of up to 200 mm and no thickness limitation.
Phone: 025-58573912
E-mail: info@hypersics.com
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